a Full SEM image of the whole-device structure. However, negligible degradation observed between Fig. High-speed Pockels modulation and second-order nonlinearities are key components in optical systems, but CMOS-compatible platforms like silicon and silicon nitride lack these capabilities. Ozaki, J., Ogiso, Y. Phys. Nat. Marko Lonar. High-speed plasmonic modulator in a single metal layer. Appl. [29] Owing to the disparity between the dielectric constants of lithium niobate and silica, the electrical field primarily affected the LN core through the slab. 1d and8a). The cavity resonance exhibits a coupling depth of 93%, corresponding to a full-swing extinction ratio of 11.5dB. 7, 10031013 (2019). Thin-film lithium niobate (TFLN) has emerged via recent progress in fabrication [20, 21] as a photonics platform with a unique set of capabilities for high-speed applications [22,23,24].While bulk and diffuse-waveguide LN have long been the workhorses of telecommunication technologies, TFLN waveguides offer nanometer-scale confinement, reducing device size, nonlinear thresholds, and switching . & Essiambre, R. J. When the modulation frequency is increased to 2.0GHz greater than the cavity linewidth, the cavity is too slow to follow the electro-optic modulation, which results in the frequency conversion of photons into sidebands with frequency separation equal to the modulation frequency. A notable decrease of optical Q is not observed until the gap is reduced to below 2.3m. Anyone you share the following link with will be able to read this content: Sorry, a shareable link is not currently available for this article. Wang, C., Zhang, M., Stern, B., Lipson, M. & Lonar, M. Nanophotonic lithium niobate electro-optic modulators. This phenomenon is shown more clearly in Fig. Nature 556, 483486 (2018). Such flexibility allows us to observe direct transition between the adiabatic driving regime and the non-adiabatic regime simply by continuously sweeping the modulation frequency to across the cavity linewidth. Reed, G. T., Mashanovich, G., Gardes, F. Y. As an example application, we applied NRZ signal with a (271)-bit pseudo-random binary sequence (PRBS) to an EOM with a Vpp of 2.0V. Figure7b, c shows the recorded eye diagrams at two different bit rates of 9 and 11Gbs1, respectively, which show clear open eyes. Express 20, 29742981 (2012). e Lattice constant a as a function of position, which is optimized for low insertion loss together with high radiation-limited optical Q. f Top view of the FEM-simulated optical mode field profile of the fundamental TE-like cavity mode \({\mathrm{{TE}}}_{01}^{0}\). Hybrid silicon photonic-lithium niobate electro-optic MachZehnder modulator beyond 100 GHz. 1541959. Our thin-film modulator (a) has an oxide layer underneath the device layer, so that velocity matching can be achieved while maximum electro-optic efficiency is maintained. The photonic-crystal hole structure was patterned with ZEP-520A positive resist via electron-beam lithography, which was then transferred to the LN layer with an Ar+ plasma milling process to etch down the full 300-nm depth. Photonics 13, 359364 (2019). Liu, K., Ye, C. R., Khan, S. & Sorger, V. J. Thorlabs free-space electro-optic (EO) amplitude and phase lithium niobate modulators combine our experience with crystal growth and electro-optic materials. Photonics 13, 8090 (2019). CAS Light Sci. All-electronic 100-GHz bandwidth digital-to-analog converter generating PAM signals up to 190Gbaud. Lithium Niobate Electro-Optic Modulators, Fiber-Coupled (1260 nm - 1625 nm) Up to 40 GHz Lithium Niobate (LiNbO 3) Modulators Fiber-Coupled, High-Speed Modulation Intensity, Phase, or I/Q X-Cut or Z-Cut Devices LNP6118 40 GHz Phase Modulator with Polarizer, Z-Cut LN81S-FC 10 GHz Intensity Modulator, X-Cut LNLVL-IM-Z M.L., U.A.J., and S.X. Figure 1: Dual-drive system layout However, when the modulation frequency is tuned above 1.0GHz towards the cavity linewidth, the two side lobes moves towards each other and the spectral shape is considerably distorted, until around 1.8GHz where the transmission spectrum splits into three lobes, with the two side lobes located about 1.8GHz from the center. A typical design requires a full air cladding to improve the optical quality factor43,45,46. In this research, we used all the nano-fabrication tricks and techniques learned from previous developments in integrated lithium niobate photonics to overcome those challenges and achieve the goal of integrating a high-powered laser on a thin-film lithium niobate platform., Harvards Office of Technology Development. Our scalable modulator devices could provide cost-effective, low-power and ultra-high-speed solutions for next-generation optical communication networks and microwave photonic systems. Nat. Here we overcome these limitations and demonstrate monolithically integrated lithium niobate electro-optic modulators that feature a CMOS-compatible drive voltage, support data rates up to 210 gigabits per second and show an on-chip optical loss of less than 0.5 decibels. High-speed Femto-Joule per bit silicon-conductive oxide nanocavity modulator. In this lesson the chirp induced by the LiNbO3 is analyzed based on the voltage of operation. The individual column at the left of each plot indicates the case when tw=0m and gap=2.5m, for a device with full surrounding air cladding. Generation of ultrastable microwaves via optical frequency division. Chen, L., Xu, Q., Wood, M. G. & Reano, R. M. Hybrid silicon and lithium niobate electro-optical ring modulator. Femtofarad optoelectronic integration demonstrating energy-saving signal conversion and nonlinear functions. Thin-lm lithium niobate on insulator (LNOI) platform. Article Weigel, P. O. et al. MathSciNet ADS Nature 568, 373377 (2019). If you find something abusive or that does not comply with our terms or guidelines please flag it as inappropriate. Nguyen, H. C., Hashimoto, S., Shinkawa, M. & Baba, T. Compact and fast photonic crystal silicon optical modulators. and M.L. Slider with three articles shown per slide. The high efficiency of electro-optic tuning together with the high optical quality of the EOM resonator enables efficient electrical driving of the optical mode into different dynamic regimes. 8c). Tanabe, T., Nishiguchi, K., Kuramochi, E. & Notomi, M. Low power and fast electro-optic silicon modulator with lateral p-i-n embedded photonic crystal nanocavity. The high quality of device fabrication as indicated by the device images implies high performance of the EOM, as we will show below. Yu, Z. 24, 234236 (2012). Res. a, b, Schematics of the cross-sections of thin-film (a) and conventional (b) LN modulators. 1f), so as to take the advantage of the largest electro-optic component r33 of LN. Nat. He, M. et al. Opt. Miller, D. A. Heterogeneous microring and Mach-Zehnder modulators based on lithium niobate and chalcogenide glasses on silicon. To improve the electro-optic coupling, we utilize a partially etched structure with a rib-waveguide-like cross-section (Figs. Schmidt, R. V. & Kaminow, I. P. Metal-diffused optical waveguides in LiNbO3. Deep learning with coherent nanophotonic circuits. In 2015 IEEE Compound Semiconductor Integrated Circuit Symposium 14 (2015); https://doi.org/10.1109/CSICS.2015.7314513, Letal, G. et al. Lu, H. et al. 1f). Opt. Light Sci. e, Group refractive indices for both optical and microwave signals as a function of the buried oxide thickness. We have applied a voltage of 25V to the device (not shown in the figure) and did not observe any degradation. The orange curve in Fig. A hybrid waveguide with a lithium niobate thin film bonded on a silicon wire is employed. Nature 528, 534538 (2015). Lu, H. et al. Li, M., Ling, J., He, Y. et al. Nature (Nature) 3, e173 (2014). B. Google Scholar. 27), which is about 22fJ per bit in our EOM. For the application of high-speed electro-optic switching, our simulations show that the electrode-waveguide spacing can be decreased to 1.5m for an optical Q of ~5000 (corresponding to a modulation bandwidth of ~45GHz), which will improve the modulation efficiency to 2.38GHzV1 (simulation details in Methods). The detector output was recorded either by a microwave network analyzer (Keysight N5235B) for characterizing the modulation bandwidth or by a sampling oscilloscope module (Keysight 54754A) to record the eye diagram of the switching signal. & Fan, S. Synthetic space with arbitrary dimensions in a few rings undergoing dynamic modulation. The flexible electro-optic modulation shown here may offer a convenient method for controlling the spectrotemporal properties of photons inside the cavity and for creating exotic quantum states48 that are crucial for quantum photonic applications. 27 March 2023, Receive 51 print issues and online access, Get just this article for as long as you need it, Prices may be subject to local taxes which are calculated during checkout. Lithium niobate etching is not required for making the hybrid optical waveguides. To characterize the performance of high-speed modulation, the majority of the modulated light output was amplified by an erbium-doped fiber amplifier to boost the power, passed through a bandpass filter to remove the amplifier noise, and was then detected by a high-speed detector (New Focus 1024). 1e) to achieve a critical coupling. PubMedGoogle Scholar. Jian, J. et al. and M.L. CAS Microwave-to-optical conversion using lithium niobate thin-film acoustic resonators. Although the breaking of the mirror symmetry along the normal direction of the device plane considerably alters the band gap of the photonic crystal (Fig. This can be changed simply by engineering the photonic-crystal mirror on the other side to function as the output port. Extended Data Fig. 50-Gb/s silicon optical modulator. conceived the experiment. Get the most important science stories of the day, free in your inbox. Lu, H. et al. Characterization of electro-optic bandwidth of ultra-high speed modulators. 11, 441446 (2017). This work is supported in part by National Science Foundation (NSF) (EFMA-1641099, ECCS-1810169, and ECCS-1842691); the Defense Threat Reduction Agency-Joint Science and Technology Office for Chemical and Biological Defense (grant No. Opt. Express 27, 1873118739 (2019). As a result, a full air cladding would strongly limits the electro-optic coupling, leading to a low efficiency of electro-optic tuning as indicated by the individual black column in Fig. External modulator is typically either a LiNbO3 modulator or an electroabsorptive modulator. Electro-optic modulator (EOM) takes a vital role in connecting the electric and optical fields. To maximize the electro-optic interaction, we utilize a partially etched structure with a rib-waveguide-like cross-section, leaving a 150-nm-thick wing layer for the electrodes to sit on (Fig. Top. To characterize the optical and electro-optic properties of the devices, a continuous-wave tunable laser (Santec TSL-510) was launched onto the chip via a lensed fiber. Further increase of the modulation frequency shifts apart the two side lobes accordingly, with amplitude decreased, while the position of the center lobe remains unchanged, as expected from the non-adiabatic driving. Thanks to the strong light confinement, we are able to place the electrode fairly close to the cavity without introducing extra optical loss (Fig. In 2017 Optical Fiber Communications Conference and Exhibition 13 (2017); https://doi.org/10.1364/OFC.2017.Tu2H.7. A variety of approaches have been employed for electro-optic modulation, such as carrier plasma dispersion6,7, electro-absorption8,9, and Pockels effect1,10, the latter of which is particularly interesting since the Pockels effect offers an ultrafast and pure refractive-index modulation over an extremely broad optical spectrum while without introducing extra loss. 1a, d). Optical modulators, using acousto-optic, magneto-optic or electro-optic effects, as the principal components for external modulation of lightwaves, have presently played the important role in modern long-haul ultra-high speed optical communications and photonic signal processing systems. Opt. Sorting out light. Express 19, 75307536 (2011). Provided by the Springer Nature SharedIt content-sharing initiative. View Spotlight analysis of the #OPG_JOSA_B paper Spiral waveguide Bragg grating modulator on thin-film Z-cut lithium niobate http://ow.ly/NsJS50NVr0m Spotlight . 8, 701705 (2014). The modulator is designed to be used in externally modulated fiberoptic transmitters for supertrunking of digitized cable-TV signals as well as for long-haul transmission of OC-192 data. Haffner, C. et al. Electro-optic modulation in slotted resonant photonic crystal heterostructures. volume562,pages 101104 (2018)Cite this article. The researchers combined the laser with a 50 gigahertz electro-optic modulator in lithium niobate to build a high-power transmitter. Quantum Electron. By combining thin-film lithium niobate devices with high-power lasers using an industry-friendly process, this research represents a key step towards large-scale, low-cost, and high-performance transmitter arrays and optical networks. Appl. (Credit: Second Bay Studios/Harvard SEAS). The gray regions represents the 3-dB bandwidth limit for two devices, respectively, and the dashed line indicates the 3-dB limit of S21. Chen, X. et al. Ultra-low power fiber-coupled gallium arsenide photonic crystal cavity electro-optic modulator. Gap denotes the spacing between the gold electrode and the LN cavity, and tw denotes the thickness of the waveguide wing layer. Light is coupled into and out of the EOM chip via one lensed fiber. Photonics 4, 518526 (2010). performed numerical simulations. Aoki, M. et al. This mode, however, has only negligible perturbation to the dielectric mode due to distinctive spatial symmetry, thus not affecting the quality of the defect cavity mode. The full cross-section is shown in d. c Dispersion property of the partially etched LN photonic-crystal nanobeam, simulated by the finite element method (FEM). Photon. https://www.thorlabs.com/newgrouppage9.cfm?objectgroup_id=3948. After the residue removal, we used diluted hydrofluoric acid to undercut the buried oxide layer to form a suspended photonic-crystal membrane structure (Fig. Liu, J. et al. BER versus OSNR for the three modulation schemes at 70Gbaud. Figure5b shows a clear linear dependence of the induced resonance wavelength shift on the applied voltage, from which we obtained a tuning slope of 16.0pmV1 (corresponding to a frequency tuning slope of 1.98GHzV1), close to our design. In this contribution, we simulate, design, and experimentally demonstrate an integrated optical isolator based on spatiotemporal modulation in the thin-film lithium niobate on an insulator waveguide platform. Photon. Li, M. et al. PubMed & Lonar, M. Monolithic ultra-high-Q lithium niobate microring resonator. Gigahertz speed operation of epsilon-near-zero silicon photonic modulators. Here we overcome these limitations and demonstrate monolithically integrated lithium niobate electro-optic modulators that feature a CMOS-compatible drive voltage, support data rates up to 210. Broadband modulation of light by using an electro-optic polymer. 5 implies that the linearity of electro-optic modulation in the devices would reach the intrinsic limit determined by the fundamental Lorentzian shape of the cavity resonance47. conceived the experiment. Silicon optical modulators. The modulators enable efficient electro-optic driving of high-Q photonic cavity modes in both adiabatic and non-adiabatic regimes, and allow us to achieve electro-optic switching at 11 Gb s1 with a bit-switching energy as low as 22 fJ. Energy efficiency, operation speed, and device dimension are thus crucial metrics underlying almost all current developments of photonic signal processing units. Express 21, 3035030357 (2013). Nevertheless, there still exists a balance between the driving voltage and modulation bandwidth. IEEE J. Sel. Open Access This article is licensed under a Creative Commons Attribution 4.0 International License, which permits use, sharing, adaptation, distribution and reproduction in any medium or format, as long as you give appropriate credit to the original author(s) and the source, provide a link to the Creative Commons license, and indicate if changes were made. High-speed plasmonic modulator in a single metal layer. Miller, D. A. Lithium niobate (LiNbO3) modulator can be regarded as a technology platform that can add values to optical networks and is suitable for addressing many issues. CAS To support on-chip integration, light is coupled to the EOM cavity via an on-chip waveguide (Fig. Laser Photonics Rev. Cai, L. et al. Technol. Science 318, 15671570 (2007). Lett. High performance optical modulator based on electro-optic polymer filled silicon slot photonic crystal waveguide. 94, 241107 (2009). 100GHz siliconorganic hybrid modulator. The demonstration of energy efficient and high-speed EOM at the wavelength scale paves an important step for device miniaturization and high-density photonic integration on the monolithic LN platform, which is expected to find broad applications in communication, computing, microwave signal processing, and quantum photonic information processing. Proc. To show this feature, we selected another similar device on the same chip, which has a lower loaded optical Q of 14,000. Song, M., Zhang, L., Beausoleil, R. G. & Willner, A. E. Nonlinear distortion in a silicon microring-based electro-optic modulator for analog optical links. Loncar is a cofounder of HyperLight Corporation, a startup which was launched to commercialize integrated photonic chips based on certain innovations developed in his lab. Express 20, 2246522474 (2012). The images or other third party material in this article are included in the articles Creative Commons license, unless indicated otherwise in a credit line to the material. This Perspective discusses and compares several different approaches to the design of high-bandwidth, low-voltage electro-optic devices, such as Mach-Zehnder modulators, made using thin-film lithium niobate (TFLN) and strategies for their incorporation as part of a larger photonic integrated circuit (PIC). & Wang, A. X. DOI: 10.1364/OL.426083 Abstract L V cm, and the 3 dB electro-optical bandwidth is about 55 GHz. Scaling an EOM down to a small footprint would reduce the device capacitance and thus decrease the switching energy27,28, which is indispensable for all practical applications. On the other hand, the full-swing extinction ratio of the EOMs is primarily determined by the external coupling of light to the modulator cavity. By 2026, the global lithium niobate modulator market is estimated to surpass US$36.711 billion by 2026, increasing from US$6.568 billion from 2018. Express 26, 220232 (2018). Wolf, S. et al. Rouvalis, E. Indium phosphide based IQ-modulators for coherent pluggable optical transceivers. The research is published in the journal Optica. Single-chip microprocessor that communicates directly using light. Appl. HDTRA11810047); and the Defense Advanced Research Projects Agency (DARPA) under Agreement No. Therefore, we expect our devices to have much higher energy efficiency, as will be shown in the following sections. Lithium Niobate Nonlinear Thermal Waveguide MODE Automation API Nonlinear Optics Photonic Integrated Circuits - Active Computing Second-harmonic generation (SHG) in a Lithium Niobite - LiNbO3 (LNO) nanophotonic waveguide is studied using temperature modulation to achieve efficient phase matching. We used two cascaded travelling wave phase modulators for spatiotemporal modulation and a racetrack resonator as a wavelength filter to suppress the sidebands of the reverse propagating . Thank you for visiting nature.com. and M.L. In 2015 Optical Fiber Communications Conference and Exhibition 13 (2015); https://doi.org/10.1364/OFC.2015.Th4E.3. Among various device geometries, photonic-crystal nanoresonators are particularly beneficial in this regard, given their exceptional capability of controlling light confinement and lightmatter interactions on the sub-wavelength scale. & Lin, Q. Quantum correlations from dynamically modulated optical nonlinear interactions. Science 358, 630632 (2017). High-speed electro-optic modulation underlies many important applications ranging from optical communication1, microwave photonics2, computing3, frequency metrology4 to quantum photonics5. Liang, H., Luo, R., He, Y., Jiang, H. & Lin, Q. Its a building block that can be integrated into larger optical systems for a range of applications, in sensing, lidar, and data telecommunications.. Q.L. This value is the smallest switching energy ever reported for LN EOMs1,13,14,15,16,17,18,19,20,21,22,23,24,25,26, clearly showing the high energy efficiency of our devices. Opt. High-performance hybrid silicon and lithium niobate Mach Zehnder modulators for 100 Gbit s1 and beyond. Open Access Open Access 34, 29412951 (2016). The authors declare no competing interests. & Thomson, D. J. These authors contributed equally: Cheng Wang, Mian Zhang, John A. Paulson School of Engineering and Applied Sciences, Harvard University, Cambridge, MA, USA, Cheng Wang,Mian Zhang,Maxime Bertrand,Amirhassan Shams-Ansari&Marko Lonar, Department of Electronic Engineering, City University of Hong Kong, Kowloon, Hong Kong, China, Xi Chen,Sethumadhavan Chandrasekhar&Peter Winzer, LP2N, Institut dOptique Graduate School, CNRS, University of Bordeaux, Talence, France, Department of Electrical Engineering and Computer Science, Howard University, Washington, DC, USA, You can also search for this author in

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